2010~before Dependence of Non-Prestonian Behavior of Ceria Slurry with Anionic Surfactant on Abrasive Concentration and Size in Shallow Trench Isolation Chemical Mechanical Polishing
본문
- Journal
- Japanese Journal of Applied Physics
- Vol
- 45
- Page
- 3896
- Year
- 2010~before
- 이전글Effect of Calcination Process on Synthesis of Ceria Particles, and its Influence on Shallow Trench Isolation Chemical Mechanical Planarization Performance 24.06.14
- 다음글The Effect of Cerium Precursor Agglomeration on the Synthesis of Ceria Particles and Its Influence on Shallow Trench Isolation Chemical Mechanical Polishing Performance 24.06.14